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Ultra-High-Purity MUOSSSXS0 Single-Source Manifold
Single-source, single-stage ultra-high purity manifold with integrated pressure regulation and purge options.
GCE Druva
Description
The druvaUHP MUOSSSXS0 is a single-source, single-stage manifold for first-stage pressure control in ultra-high purity gas supply systems. It is designed for ultra-pure, inert, flammable and oxidising gases and their mixtures. It is engineered with a stainless steel body, electropolished 0.25 μm Ra internal surfaces, and a Hastelloy diaphragm sealing system. The gas manifold supports inlet pressures up to 200 bar (2900 psig) and delivery pressures up to 7 bar.
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Features
- The Hastelloy®/Elgiloy® diaphragm sealing system provides reliable sealing to the atmosphere.
- Compact design minimises installation space.
- Excellent pressure adjustment for precise control of delivery pressure in UHP gas supply systems.
- The process purge system supports controlled purging of the gas path.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
- O₂ applications: Contact the factory for suitability and configuration requirements.
Specifications
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