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Ultra-High-Purity MUPDSMXS0 Single-Source Manifold
Single-source ultra-high-purity manifold with VAR stainless steel construction and free-poppet first-stage pressure regulation.
GCE Druva
Description
The druvaUHP MUPDSMXS0 is a single-source, single-stage manifold for first-stage pressure control in ultra-high-purity gas supply systems. It is designed for ultra-pure, inert, flammable and oxidising gases and their mixtures. The manifold uses a free-poppet regulator design with a VAR stainless steel 316L regulator and valve bodies and electropolished internal surfaces with an average finish of 0.13 μm Ra. It supports inlet pressures up to 200 bar (2900 psig).
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Features
- VAR stainless steel 316L regulator and valve bodies for contamination-free performance.
- Hastelloy®/Elgiloy® diaphragm sealing system for reliable sealing to atmosphere.
- Compact design for space-saving installation.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
- Process gas purging system for controlled purging of the gas path.
- For O₂ applications, please contact the factory.
Specifications
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