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Ultra-High-Purity PUPDSMS0 Single-Stage Point of Use
Second-stage pressure control for ultra-high-purity gas systems, with free-poppet regulation and optional purge connections.
GCE Druva
Description
The druvaUHP PUPDSMS0 is a single-stage, second-stage point-of-use unit for gas supply systems using ultra-pure, inert, flammable, oxidising, corrosive and/or toxic gases and their mixtures. It features a free-poppet regulator design, VAR stainless steel 316L construction, and 0.13 μm Ra average electropolished internal surfaces.
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Features
- VAR stainless steel 316L construction for corrosion-free durability.
- 0.13 μm Ra electropolished internal surfaces provide a smooth internal gas path.
- The Hastelloy®/Elgiloy® diaphragm sealing system provides a reliable seal to the atmosphere.
- High leak integrity with an inboard leak rate of ≤1 × 10⁻⁹ mbar l/s He and a seat leak rate of ≤4 × 10⁻⁸ mbar l/s He.
- Optional purge ports available at the inlet and outlet.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
Specifications
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