Ultra-High-Purity PURSSSS0 Single-Stage Point of Use
Second-stage pressure control for ultra-high-purity gas systems, with free-poppet regulation and multiple pressure configurations.
GCE Druva
Description
The druvaUHP PURSSSS0 is a single-stage, second-stage point-of-use unit for gas supply systems using ultra-pure, inert, flammable, oxidising, corrosive and/or toxic gases and their mixtures. It features a free-poppet regulator design and stainless steel 316L construction with 0.25 μm Ra average electropolished internal surfaces.
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Features
- The Hastelloy®/Elgiloy® diaphragm sealing system provides a reliable sealing to the atmosphere.
- Compact design minimises installation space.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
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