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Ultra-High-Purity MUPDSMXST Single-Source Manifold
Single-source ultra-high-purity manifold with VAR stainless steel construction and tied-diaphragm first-stage pressure regulation.
GCE Druva
Description
The druvaUHP MUPDSMXST is a single-source, single-stage manifold for first-stage pressure control in ultra-high-purity gas supply systems. It is designed for ultra-pure, inert, flammable, oxidising, corrosive and/or toxic gases and their mixtures. This UHP manifold combines a tied-diaphragm regulator design with VAR stainless steel 316L construction and 0.13 μm Ra average electropolished internal surfaces.
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Features
- Hastelloy®/Elgiloy® diaphragm sealing system for reliable sealing to atmosphere.
- Compact design for space-saving installation.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
- Process gas purging system for controlled purging of the gas path.
- For O₂ applications, please contact the factory.
Specifications
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