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Ultra-High-Purity MUQDSMXST Single-Source Manifold
Single-source ultra-high-purity manifold for first-stage pressure control of corrosive and toxic gases.
GCE Druva
Description
The druvaUHP MUQDSMXST is a single-source, single-stage manifold designed for first-stage pressure control in ultra-high-purity gas supply systems. It is intended for ultra-pure, corrosive, and/or toxic gases and their mixtures. The unit uses a tied-diaphragm regulator design with VAR stainless steel 316L construction and 0.13 μm Ra average electropolished internal surfaces. It supports inlet pressures up to 69 bar (1000 psig) and delivery pressures up to 10 bar.
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Features
- Hastelloy®/Elgiloy® diaphragm sealing system for reliable sealing to atmosphere.
- Compact design for space-saving installation.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
- Process gas purging system for controlled purging of the gas path.
- For O₂ applications, please contact the factory.
Specifications
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