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Ultra-High-Purity MUPSSMXST Single-Source Manifold
Single-source ultra-high-purity manifold with tied diaphragm regulation and process gas purging.
GCE Druva
Description
The druvaUHP MUPSSMXST is a single-source, single-stage manifold designed for first-stage pressure control in ultra-high-purity gas supply systems. It is suitable for ultra-pure, inert, flammable, oxidising, corrosive, and/or toxic gases and their mixtures. The gas manifold features a stainless steel 316L construction, tied diaphragm regulator design, and electropolished internal surfaces with an average finish of 0.13 μm Ra.
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Features
- Tied diaphragm regulator design for first-stage pressure regulation.
- Hastelloy®/Elgiloy® diaphragm sealing system for reliable sealing to atmosphere.
- Process gas purging system for controlled purging of the gas path.
- Stainless steel 316L construction for the regulator, valve, filter, and safety device bodies.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
Specifications
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