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Ultra-High-Purity MUOSSSSS0 Double-Source Semiautomatic Manifold
Dual-source, single-stage ultra-high-purity manifold with semi-automatic switchover, pressure regulation, and purge options.
GCE Druva
Description
The druvaUHP MUOSSSSS0 gas manifold offers first-stage pressure control in ultra-high-purity gas supply systems. It is designed for ultra-pure, inert, flammable, and oxidising gases and their mixtures. It features a stainless steel body, electropolished 0.25 μm Ra internal surfaces, and a Hastelloy® diaphragm sealing system. The gas manifold supports inlet pressures up to 200 bar (2900 psig) and delivery pressures up to 10 bar.
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Features
- The Hastelloy®/Elgiloy® diaphragm sealing system provides reliable sealing to the atmosphere.
- Compact design minimises installation space.
- Supports gas supply from dual sources with a semiautomatic switchover mechanism.
- Regulator performance complies with relevant sections of SEMI E49 and SEMI F101-1105.
- Valve performance complies with relevant sections of SEMI E49 and ASTM F1373.
- For O₂ applications, please contact the factory.
Specifications
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